Publication:
Improvement of carbon depth profiling within shallow structures by secondary ion mass spectrometry (SIMS)
| dc.contributor.author | Merkulov, Alex | |
| dc.contributor.author | Franquet, Alexis | |
| dc.contributor.author | Tilmann, Rita | |
| dc.date.accessioned | 2025-12-01T16:00:06Z | |
| dc.date.available | 2025-12-01T16:00:06Z | |
| dc.date.createdwos | 2025-11-29 | |
| dc.date.issued | 2026 | |
| dc.identifier.doi | 10.1016/j.vacuum.2025.114893 | |
| dc.identifier.issn | 0042-207X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/58477 | |
| dc.language.iso | eng | |
| dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | |
| dc.source.beginpage | 114893 | |
| dc.source.issue | Part A, January | |
| dc.source.journal | VACUUM | |
| dc.source.numberofpages | 7 | |
| dc.source.volume | 244 | |
| dc.subject.keywords | CLUSTER | |
| dc.subject.keywords | BEAMS | |
| dc.title | Improvement of carbon depth profiling within shallow structures by secondary ion mass spectrometry (SIMS) | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2025-12-01 | |
| imec.internal.source | crawler | |
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