Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Enabling sub-5nm CMOS technology scaling thinner and taller!
Publication:
Enabling sub-5nm CMOS technology scaling thinner and taller!
Copy permalink
Date
2019
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ryckaert, Julien
;
Na, Myung Hee
;
Weckx, Pieter
;
Jang, Doyoung
;
Schuddinck, Pieter
;
Chehab, Bilal
;
Patli, Sudhir
;
Sarkar, Satadru
;
Zografos, Odysseas
;
Baert, Rogier
;
Verkest, Diederik
Journal
Abstract
Description
Statistics
Views
1978
since deposited on 2021-10-27
2
last month
1
last week
Acq. date: 2026-02-25
Citations
Statistics
Views
1978
since deposited on 2021-10-27
2
last month
1
last week
Acq. date: 2026-02-25
Citations