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On the apparent decay length of metal at the metal-oxide/Si interface

Date

2007
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dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorFranquet, Alexis
dc.contributor.authorBerghmans, Bart
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-16T15:22:47Z
dc.date.available2021-10-16T15:22:47Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11899
dc.source.conferenceSIMS XVI
dc.source.conferencedate29/10/2007
dc.source.conferencelocationKanazawa Japan
dc.title

On the apparent decay length of metal at the metal-oxide/Si interface

dc.typeOral presentation
dspace.entity.typePublication
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