Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Low Vt Ni-FUSI CMOS technology using a DyO cap layer with either single or dual Ni-phases
Publication:
Low Vt Ni-FUSI CMOS technology using a DyO cap layer with either single or dual Ni-phases
Date
2007
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Yu, HongYu
;
Chang, Shou-Zen
;
Veloso, Anabela
;
Lauwers, Anne
;
Adelmann, Christoph
;
Onsia, Bart
;
Van Elshocht, Sven
;
Singanamalla, Raghunath
;
Demand, Marc
;
Vos, Rita
;
Kauerauf, Thomas
;
Brus, Stephan
;
Shi, Xiaoping
;
Kubicek, Stefan
;
Vrancken, Christa
;
Mitsuhashi, Riichirou
;
Lehnen, Peer
;
Kittl, Jorge
;
Niwa, M.
;
Yin, K.M.
;
Hoffmann, Thomas
;
De Gendt, Stefan
;
Jurczak, Gosia
;
Absil, Philippe
;
Biesemans, Serge
Journal
Abstract
Description
Metrics
Views
1943
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1943
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations