Publication:
ESD on-wafer characterization: Is TLP still the right measurement tool?
Date
| dc.contributor.author | Scholz, Mirko | |
| dc.contributor.author | Linten, Dimitri | |
| dc.contributor.author | Thijs, Steven | |
| dc.contributor.author | Sangameswaran, Sandeep | |
| dc.contributor.author | Sawada, Masanori | |
| dc.contributor.author | Nakaie, T. | |
| dc.contributor.author | Hasebe, Takumi | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.imecauthor | Linten, Dimitri | |
| dc.contributor.imecauthor | Thijs, Steven | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
| dc.contributor.orcidimec | Thijs, Steven::0000-0003-2889-8345 | |
| dc.date.accessioned | 2021-10-18T02:43:47Z | |
| dc.date.available | 2021-10-18T02:43:47Z | |
| dc.date.issued | 2009-10 | |
| dc.identifier.issn | 0018-9456 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16176 | |
| dc.source.beginpage | 3418 | |
| dc.source.endpage | 3426 | |
| dc.source.issue | 10 | |
| dc.source.journal | IEEE Transactions on Instrumentation and Measurement | |
| dc.source.volume | 58 | |
| dc.title | ESD on-wafer characterization: Is TLP still the right measurement tool? | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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