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Ultrathin film high-k dielectrics from aqueous CSD: relations between deposition route, material properties and electrical properties
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Ultrathin film high-k dielectrics from aqueous CSD: relations between deposition route, material properties and electrical properties
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hardy, An
;
Van Elshocht, Sven
;
Van Bael, Marlies
;
D'Haen, Jan
;
De Gendt, Stefan
;
Adelmann, Christoph
;
Conard, Thierry
;
Franquet, Alexis
;
Richard, Olivier
;
D'Olieslaeger, Marc
;
Heyns, Marc
;
Mullens, J.
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1883
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Acq. date: 2025-12-15
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Metrics
Views
1883
since deposited on 2021-10-17
1
last month
1
last week
Acq. date: 2025-12-15
Citations