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On the activation and passivation of precursors for process-induced positive charges in Hf-dielectric stacks
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1928 since deposited on 2021-10-17
2last month
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Acq. date: 2025-12-08
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Views
1928 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2025-12-08
Citations