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From fundamental insights into growth and nucleation mechanisms to area-selective deposition

Date

2018
Meeting abstract
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorSoethoudt, Job
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBarla, Kathy
dc.contributor.authorGrillo, Fabio
dc.contributor.authorMarques, Esteban
dc.contributor.authorVan Ommen, Ruud
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorBarla, Kathy
dc.contributor.imecauthorMarques, Esteban
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-25T17:59:07Z
dc.date.available2021-10-25T17:59:07Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30585
dc.identifier.urlhttps://www2.avs.org/symposium2018/Papers/Paper_TF+AM+EM+PS-TuM10.html
dc.source.beginpageTF+AM+EM+PS-TuM1
dc.source.conferenceAVS - american vacuum society international symposium and exhibition
dc.source.conferencedate21/10/2018
dc.source.conferencelocationLong Beach, CA USA
dc.title

From fundamental insights into growth and nucleation mechanisms to area-selective deposition

dc.typeMeeting abstract
dspace.entity.typePublication
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