Publication:

A ViT-Based Approach for Enhanced Defect Classification in Nano-Ridge Engineering Using Multi-Resolution Images

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3052289
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dc.contributor.authorDey, Bappaditya
dc.contributor.authorTandecki, Tom
dc.contributor.authorBelgharat, Aya
dc.contributor.authorSwekis, Peter
dc.contributor.authorAlcotte, Reynald
dc.contributor.authorMols, Yves
dc.contributor.authorKunert, Bernardette
dc.contributor.authorHalder, Sandip
dc.contributor.imecauthorDey, Bappaditya
dc.contributor.imecauthorTandecki, Tom
dc.contributor.imecauthorBelgharat, Aya
dc.contributor.imecauthorSwekis, Peter
dc.contributor.imecauthorAlcotte, Reynald
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecDey, Bappaditya::0000-0002-0886-137X
dc.contributor.orcidimecTandecki, Tom::0009-0001-2609-6341
dc.contributor.orcidimecSwekis, Peter::0000-0003-1645-8190
dc.contributor.orcidimecAlcotte, Reynald::0009-0001-6529-0948
dc.contributor.orcidimecMols, Yves::0000-0002-7072-0113
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2025-07-28T03:57:58Z
dc.date.available2025-07-28T03:57:58Z
dc.date.issued2025
dc.identifier.doi10.1117/12.3052289
dc.identifier.eisbn978-1-5106-8639-7
dc.identifier.isbn978-1-5106-8638-0
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45964
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage134263H-1
dc.source.conference2025 Conference on Metrology Inspection and Process Control-Annual
dc.source.conferencedate2025-02-28
dc.source.conferencelocationSan Jose
dc.source.endpage134263H-21
dc.source.journalProceedings of SPIE
dc.source.numberofpages21
dc.subject.keywordsSI
dc.title

A ViT-Based Approach for Enhanced Defect Classification in Nano-Ridge Engineering Using Multi-Resolution Images

dc.typeProceedings paper
dspace.entity.typePublication
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