Publication:
A ViT-Based Approach for Enhanced Defect Classification in Nano-Ridge Engineering Using Multi-Resolution Images
| dc.contributor.author | Dey, Bappaditya | |
| dc.contributor.author | Tandecki, Tom | |
| dc.contributor.author | Belgharat, Aya | |
| dc.contributor.author | Swekis, Peter | |
| dc.contributor.author | Alcotte, Reynald | |
| dc.contributor.author | Mols, Yves | |
| dc.contributor.author | Kunert, Bernardette | |
| dc.contributor.author | Halder, Sandip | |
| dc.contributor.imecauthor | Dey, Bappaditya | |
| dc.contributor.imecauthor | Tandecki, Tom | |
| dc.contributor.imecauthor | Belgharat, Aya | |
| dc.contributor.imecauthor | Swekis, Peter | |
| dc.contributor.imecauthor | Alcotte, Reynald | |
| dc.contributor.imecauthor | Mols, Yves | |
| dc.contributor.imecauthor | Kunert, Bernardette | |
| dc.contributor.imecauthor | Halder, Sandip | |
| dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
| dc.contributor.orcidimec | Tandecki, Tom::0009-0001-2609-6341 | |
| dc.contributor.orcidimec | Swekis, Peter::0000-0003-1645-8190 | |
| dc.contributor.orcidimec | Alcotte, Reynald::0009-0001-6529-0948 | |
| dc.contributor.orcidimec | Mols, Yves::0000-0002-7072-0113 | |
| dc.contributor.orcidimec | Kunert, Bernardette::0000-0002-8986-4109 | |
| dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
| dc.date.accessioned | 2025-07-28T03:57:58Z | |
| dc.date.available | 2025-07-28T03:57:58Z | |
| dc.date.issued | 2025 | |
| dc.identifier.doi | 10.1117/12.3052289 | |
| dc.identifier.eisbn | 978-1-5106-8639-7 | |
| dc.identifier.isbn | 978-1-5106-8638-0 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45964 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 134263H-1 | |
| dc.source.conference | 2025 Conference on Metrology Inspection and Process Control-Annual | |
| dc.source.conferencedate | 2025-02-28 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.endpage | 134263H-21 | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 21 | |
| dc.subject.keywords | SI | |
| dc.title | A ViT-Based Approach for Enhanced Defect Classification in Nano-Ridge Engineering Using Multi-Resolution Images | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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