Publication:
Ultra-low copper baths for sub-35nm copper interconnects
Date
| dc.contributor.author | Atanasova, Tanya | |
| dc.date.accessioned | 2021-10-19T12:30:02Z | |
| dc.date.available | 2021-10-19T12:30:02Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18498 | |
| dc.source.conference | IMEC PhD Conference Fun in Research | |
| dc.source.conferencedate | 22/11/2011 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | Ultra-low copper baths for sub-35nm copper interconnects | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |