Publication:
CMOS-Fabricated Ring Surface Ion Trap with TSV Integration
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-4850-9354 | |
| cris.virtualsource.department | 44999307-3622-4542-94ae-888bfbd005d3 | |
| cris.virtualsource.orcid | 44999307-3622-4542-94ae-888bfbd005d3 | |
| dc.contributor.author | Zhao, Peng | |
| dc.contributor.author | Lim, Yu Dian | |
| dc.contributor.author | Li, Hongyu | |
| dc.contributor.author | Likforman, Jean-Pierre | |
| dc.contributor.author | Guidoni, Luca | |
| dc.contributor.author | Desormeaux, Lilay Gros | |
| dc.contributor.author | Tan, Chuan Seng | |
| dc.date.accessioned | 2026-06-03T09:44:08Z | |
| dc.date.available | 2026-06-03T09:44:08Z | |
| dc.date.createdwos | 2026-03-24 | |
| dc.date.issued | 2023 | |
| dc.description.abstract | We present the design, fabrication, and test of ring surface trap on 12-inch wafers with a CMOS process. The design is based on Through Silicon Vias (TSV) interconnects. Up to 200 ions were loaded and cooled; preliminary compensations of electrostatic potential imperfections show that rotational symmetry can be partially restored. | |
| dc.description.wosFundingText | This research was co-supported by ANR-NRF Joint Grant Call NRF2020-NRF-ANR073 HIT. We acknowledge the fabrication support from IME and AMF, Singapore. | |
| dc.identifier.doi | 10.1109/iedm45741.2023.10413875 | |
| dc.identifier.issn | 2380-9248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/59527 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | IEEE | |
| dc.source.conference | International Electron Devices Meeting (IEDM) | |
| dc.source.conferencedate | 2023-12-09 | |
| dc.source.conferencelocation | San Francisco | |
| dc.source.journal | 2023 INTERNATIONAL ELECTRON DEVICES MEETING, IEDM | |
| dc.source.numberofpages | 4 | |
| dc.title | CMOS-Fabricated Ring Surface Ion Trap with TSV Integration | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2026-04-07 | |
| imec.internal.source | crawler | |
| imec.internal.wosCreatedAt | 2026-04-07 | |
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