Publication:

Nested Sampling aided determination of tantalum optical constants in the EUV spectral range

Date

2022
Journal article
https://doi.org/10.1364/AO.472556
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dc.contributor.authorSaadeh, Qais
dc.contributor.authorNaujok, Philipp
dc.contributor.authorWu, Meiyi
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorThakare, Devesh
dc.contributor.authorScholze, Frank
dc.contributor.authorBuchholz, Christian
dc.contributor.authorStadelhoff, Christian
dc.contributor.authorWiesner, Thomas
dc.contributor.authorSoltwisch, Victor
dc.contributor.imecauthorWu, Meiyi
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorThakare, Devesh
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecThakare, Devesh::0000-0003-3265-7042
dc.date.accessioned2023-03-16T09:27:10Z
dc.date.available2022-12-26T03:09:54Z
dc.date.available2023-01-05T08:52:33Z
dc.date.available2023-03-16T09:27:10Z
dc.date.embargo2022-11-22
dc.date.issued2022
dc.description.wosFundingTextElectronic Components and Systems for European Leadership (783247); European Metrology Programme for Innovation and Research (20IND04).
dc.identifier.doi10.1364/AO.472556
dc.identifier.issn1559-128X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40915
dc.publisherOptica Publishing Group
dc.source.beginpage10032
dc.source.endpage10042
dc.source.issue33
dc.source.journalAPPLIED OPTICS
dc.source.numberofpages11
dc.source.volume61
dc.subject.keywordsX-RAY REFLECTIVITY
dc.subject.keywordsEXTREME-ULTRAVIOLET
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsREFLECTANCE
dc.subject.keywordsSCATTERING
dc.subject.keywordsTHICKNESS
dc.subject.keywordsSURFACE
dc.subject.keywordsDESIGN
dc.subject.keywordsDIFFRACTION
dc.subject.keywordsEFFICIENT
dc.title

Nested Sampling aided determination of tantalum optical constants in the EUV spectral range

dc.typeJournal article
dspace.entity.typePublication
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