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Sputter yield- and ionisation yield variations of 100% Ge bombarded by O2+ primary ions

Date

2003
Meeting abstract
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dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-15T04:58:15Z
dc.date.available2021-10-15T04:58:15Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7672
dc.source.beginpage251
dc.source.conferenceInternational Conference on Secondary Ion Mass Spectrometry - SIMS XIV
dc.source.conferencedate14/09/2003
dc.source.conferencelocationSan Diego USA
dc.title

Sputter yield- and ionisation yield variations of 100% Ge bombarded by O2+ primary ions

dc.typeMeeting abstract
dspace.entity.typePublication
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