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Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon
Publication:
Impact of Ni-silicide grain orientation on the strain and stress fields induced in patterned silicon
Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Torregiani, Cristina
;
Maex, Karen
;
Benedetti, Alessandro
;
Bender, Hugo
;
Van Houtte, P.
;
Pawlak, Bartek
;
Kittl, Jorge
Journal
Applied Physics Letters
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1892
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1892
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations