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Thermal processing of high-K materials thermodynamics and kinetics

Date

2002
Meeting abstract
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dc.contributor.authorYoung, Edward
dc.contributor.authorChen, Jian
dc.contributor.authorCosnier, Vincent
dc.contributor.authorLysaght, P.
dc.contributor.authorMaes, Jan
dc.contributor.authorRoozeboom, F.
dc.contributor.authorZhao, Chao
dc.contributor.imecauthorMaes, Jan
dc.date.accessioned2021-10-15T00:10:39Z
dc.date.available2021-10-15T00:10:39Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7090
dc.source.beginpage715
dc.source.conference201st Meeting of the Electrochemical Society. Rapid Thermal and Other Short Time Processing Technologies III
dc.source.conferencedate12/05/2002
dc.source.conferencelocationPhiladelphia, PA USA
dc.title

Thermal processing of high-K materials thermodynamics and kinetics

dc.typeMeeting abstract
dspace.entity.typePublication
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