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Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
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Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
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Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jourdain, Anne
;
De Moor, Piet
;
Pamidighantam, Sayanu
;
Tilmans, Harrie
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1904
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations
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Views
1904
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations