Publication:
Replacement metal gate/high-k last technology for aggressively scaled planar and FinFET-based devices
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1904 since deposited on 2021-10-22
Acq. date: 2026-03-17
Citations
Statistics
Views
1904 since deposited on 2021-10-22
Acq. date: 2026-03-17
Citations