Publication:
Metrology for nano-electronics: challenges and solutions
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-17T12:10:31Z | |
| dc.date.available | 2021-10-17T12:10:31Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14699 | |
| dc.source.conference | Semicon Europa | |
| dc.source.conferencedate | 7/10/2008 | |
| dc.source.conferencelocation | Stuttgart Germany | |
| dc.title | Metrology for nano-electronics: challenges and solutions | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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