Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band

dc.contributor.author	Kirsch, Philippe
dc.contributor.author	Assouar, Mohammed B.
dc.contributor.author	Elmazria, Omar
dc.contributor.author	El Hakiki, M.
dc.contributor.author	Mortet, Vincent
dc.contributor.author	Alnot, Patrick
dc.date.accessioned	2021-10-16T17:07:32Z
dc.date.available	2021-10-16T17:07:32Z
dc.date.embargo	9999-12-31
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12402
dc.source.beginpage	1486
dc.source.endpage	1491
dc.source.issue	7
dc.source.journal	IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control
dc.source.volume	54
dc.title	Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band
dc.type	Journal article
dspace.entity.type	Publication
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