Publication:
Scanning spreading resistance microscopy for the calibration of process simulators on 65nm MOS technology.
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1883 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-12
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Metrics
Views
1883 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-12
Citations