Publication:

Optical extensions integration for a 0.314-μm² 45-nm node 6-transistor SRAM cell

Date

2005
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVerhaegen, Staf
dc.contributor.authorNackaerts, Axel
dc.contributor.authorWiaux, Vincent
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecWiaux, Vincent::0000-0002-8923-5708
dc.contributor.orcidimecHendrickx, Eric::0000-0003-2516-0417
dc.date.accessioned2021-10-16T06:49:28Z
dc.date.available2021-10-16T06:49:28Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11507
dc.source.beginpage120
dc.source.conferenceDesign and Process Integration for Microlithography III
dc.source.conferencedate27/02/2005
dc.source.conferencelocationSan Jose, CA USA
dc.source.endpage130
dc.title

Optical extensions integration for a 0.314-μm² 45-nm node 6-transistor SRAM cell

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions