Effect of the composition of electrolyte on separation of porous silicon film by electrochemical etching

dc.contributor.author	Solanki, Chetan Singh
dc.contributor.author	Bilyalov, Renat
dc.contributor.author	Poortmans, Jef
dc.contributor.author	Celis, Jean-Pierre
dc.contributor.author	Nijs, Johan
dc.contributor.imecauthor	Poortmans, Jef
dc.contributor.orcidimec	Poortmans, Jef::0000-0003-2077-2545
dc.date.accessioned	2021-10-14T23:13:10Z
dc.date.available	2021-10-14T23:13:10Z
dc.date.issued	2002
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/6840
dc.source.conference	3rd International Conference on Porous Semiconductors Science and Technology
dc.source.conferencedate	11/03/2002
dc.source.conferencelocation	Tenerife Spain
dc.title	Effect of the composition of electrolyte on separation of porous silicon film by electrochemical etching
dc.type	Oral presentation
dspace.entity.type	Publication
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