Preparation and characterization of rare earth scandates as alternative gate oxide materials

dc.contributor.author	Wagner, M.
dc.contributor.author	Heeg, T.
dc.contributor.author	Schubert, J.
dc.contributor.author	Zhao, Chao
dc.contributor.author	Richard, Olivier
dc.contributor.author	Caymax, Matty
dc.contributor.author	Afanasiev, Valeri
dc.contributor.author	Mantl, S.
dc.contributor.imecauthor	Richard, Olivier
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.imecauthor	Afanasiev, Valeri
dc.contributor.orcidimec	Richard, Olivier::0000-0002-3994-8021
dc.date.accessioned	2021-10-16T06:59:33Z
dc.date.available	2021-10-16T06:59:33Z
dc.date.issued	2005
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/11534
dc.source.conference	6th European Conference on Ultimate Integration of Silicon - ULIS
dc.source.conferencedate	7/04/2005
dc.source.conferencelocation	Bologna Italy
dc.title	Preparation and characterization of rare earth scandates as alternative gate oxide materials
dc.type	Proceedings paper
dspace.entity.type	Publication
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