Publication:

Simple current and capacitance methods for bulk FinFET height extraction

Date

2011-03
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorChiarella, Thomas
dc.contributor.authorParvais, Bertrand
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorKerner, Christoph
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-19T12:47:55Z
dc.date.available2021-10-19T12:47:55Z
dc.date.embargo9999-12-31
dc.date.issued2011-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18682
dc.source.beginpage158
dc.source.conferenceIEEE International Conference on Microelectronic Test Structures - ICMTS
dc.source.conferencedate4/04/2011
dc.source.conferencelocationAmsterdam The Netherlands
dc.source.endpage161
dc.title

Simple current and capacitance methods for bulk FinFET height extraction

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
21403.pdf
Size:
670.05 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions