Publication:

Reliability challenges during different phases of 3D SIC processing

Date

2012
Meeting abstract
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Author(s)

Croes, Kristof  
;
Civale, Yann
;
Labie, Riet  
;
Li, Yunlong  
;
De Messemaeker, Joke  
;
Vanstreels, Kris  
;
Redolfi, Augusto  
;
Velenis, Dimitrios  
;
Varela Pedreira, Olalla  
;
Van De Peer, Myriam  
;
Cherman, Vladimir  
;
Vandevelde, Bart  
;
Beyne, Eric  
;
De Wolf, Ingrid  

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Abstract

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1908 since deposited on 2021-10-20
Acq. date: 2026-02-26

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1908 since deposited on 2021-10-20
Acq. date: 2026-02-26

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