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Influence of porosity on electrical properties of low-k dielectrics

Date

2010
Meeting abstract
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dc.contributor.authorVan Besien, Els
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorZhao, Larry
dc.contributor.authorDe Roest, David
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.accessioned2021-10-18T22:50:06Z
dc.date.available2021-10-18T22:50:06Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18151
dc.source.conferenceAdvanced Metallization Conference - AMC
dc.source.conferencedate5/10/2010
dc.source.conferencelocationAlbany, NY USA
dc.title

Influence of porosity on electrical properties of low-k dielectrics

dc.typeMeeting abstract
dspace.entity.typePublication
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