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A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer

Date

2011
Proceedings Paper
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dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLofrano, Melina
dc.contributor.authorJansen, Roelof
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSeveri, Simone
dc.contributor.authorBorremans, Jonathan
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorDonnay, Stephane
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-19T13:03:48Z
dc.date.available2021-10-19T13:03:48Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18779
dc.source.conference16th International Conference on Solid-State sensors, Actuators and Microsystems - Transducers
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
dc.title

A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer

dc.typeProceedings paper
dspace.entity.typePublication
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