Publication:
Growth of strained Si on He ion implanted Si/SiGe heterostructures
Date
| dc.contributor.author | Buca, D. | |
| dc.contributor.author | Feste, S. | |
| dc.contributor.author | Hollander, B. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Carius, R. | |
| dc.contributor.author | Schaefer, H. | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-16T00:51:38Z | |
| dc.date.available | 2021-10-16T00:51:38Z | |
| dc.date.issued | 2005-04 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10167 | |
| dc.source.beginpage | 11 | |
| dc.source.conference | 6th European Conference on Integration in Silicon - ULIS | |
| dc.source.conferencedate | 7/04/2005 | |
| dc.source.conferencelocation | Bologna Italy | |
| dc.source.endpage | 14 | |
| dc.title | Growth of strained Si on He ion implanted Si/SiGe heterostructures | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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