Publication:

Nitrogen profile and dielectric cap layer (Al2O3, Dy2O3, La2O3) engineering on Hf-silicate

Date

2007
Proceedings Paper
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Author(s)

Cho, Hag-Ju
;
Yu, HongYu
;
Ragnarsson, Lars-Ake  
;
Chang, Vincent
;
Schram, Tom  
;
O'Sullivan, Barry  
;
Kubicek, Stefan  
;
Mitsuhashi, Riichirou
;
Akheyar, Amal
;
Van Elshocht, Sven  
;
Witters, Thomas  
;
Delabie, Annelies  
;
Adelmann, Christoph  
;
Rohr, Erika
;
Singanamalla, Raghunath
;
Chang, Shou-Zen
;
Swerts, Johan  
;
Lehnen, Peer
;
De Gendt, Stefan  
;
Absil, Philippe  
;
Biesemans, Serge  

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