Publication:

Integration issues of polysilicon with high k dielectrics deposited by Atomic Layer Chemical Vapor Deposition

Date

2002
Proceedings Paper
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Author(s)

Tsai, Wilman
;
Chen, Jian
;
Carter, Richard
;
Cartier, Eduard
;
Kluth, Jon
;
Richard, Olivier  
;
Claes, Martine  
;
Lin, Steven
;
Nohira, Hiroshi
;
Conard, Thierry  
;
Caymax, Matty  
;
Young, Edward
;
Vandervorst, Wilfried  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Manabe, Yukiko
;
Maes, Jan  
;
Rittersma, Chris
;
Besling, Wim
;
Roozeboom, F.

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