Publication:
Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures
Date
| dc.contributor.author | Armigliato, A. | |
| dc.contributor.author | Balboni, R. | |
| dc.contributor.author | Corticelli, F. | |
| dc.contributor.author | Frabboni, S. | |
| dc.contributor.author | Malvezzi, F. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.date.accessioned | 2021-09-29T12:39:42Z | |
| dc.date.available | 2021-09-29T12:39:42Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19 | |
| dc.source.conference | 1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain. | |
| dc.title | Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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