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Defect passivation in chemical vapour deposited fine-grained polycrystalline silicon by plasma hydrogenation
Publication:
Defect passivation in chemical vapour deposited fine-grained polycrystalline silicon by plasma hydrogenation
Date
2005
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Carnel, Lodewijk
;
Gordon, Ivan
;
Van Nieuwenhuysen, Kris
;
Van Gestel, Dries
;
Beaucarne, Guy
;
Poortmans, Jef
Journal
Thin Solid Films
Abstract
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1929
since deposited on 2021-10-16
423
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Acq. date: 2025-10-24
Citations
Metrics
Views
1929
since deposited on 2021-10-16
423
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations