Publication:

Challenges and opportunities for vertical nanowire FETs: device design and fabrication

Date

2018
Proceedings Paper
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dc.contributor.authorVeloso, Anabela
dc.contributor.authorMatagne, Philippe
dc.contributor.authorHuynh Bao, Trong
dc.contributor.authorEneman, Geert
dc.contributor.authorLoo, Roger
dc.contributor.authorWostyn, Kurt
dc.contributor.authorBrus, Stephan
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorMocuta, Dan
dc.contributor.authorRyckaert, Julien
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned2021-10-26T08:11:48Z
dc.date.available2021-10-26T08:11:48Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32167
dc.identifier.urlhttp://www.ssdm.jp/SSDM2018_TechnicalProgram-All_Sep11-13.pdf?d=20180824
dc.source.beginpage159
dc.source.conference50th International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate9/09/2018
dc.source.conferencelocationTokyo Japan
dc.source.endpage160
dc.title

Challenges and opportunities for vertical nanowire FETs: device design and fabrication

dc.typeProceedings paper
dspace.entity.typePublication
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