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Growth and integration of high-density CNT for advanced interconnects

Date

2008
Meeting abstract
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dc.contributor.authorVereecken, Philippe
dc.contributor.authorCott, Daire
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorVerhulst, Anne
dc.contributor.authorHantschel, Thomas
dc.contributor.authorRichard, Olivier
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-17T12:28:59Z
dc.date.available2021-10-17T12:28:59Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14742
dc.identifier.urlwww.icsfs.ie
dc.source.beginpage182
dc.source.conference14th International Conference on Solid Films and Surfaces - ICSFS
dc.source.conferencedate29/06/2008
dc.source.conferencelocationDublin Ireland
dc.source.endpage183
dc.title

Growth and integration of high-density CNT for advanced interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
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