Publication:
Stress issues in copper/low-k integration
Date
| dc.contributor.author | Brongersma, Sywert | |
| dc.contributor.imecauthor | Brongersma, Sywert | |
| dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
| dc.date.accessioned | 2021-10-16T00:50:49Z | |
| dc.date.available | 2021-10-16T00:50:49Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10158 | |
| dc.source.conference | 8th International Workshop on Stress-Induced Phenomena in Metallization | |
| dc.source.conferencedate | 12/09/2005 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | Stress issues in copper/low-k integration | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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