Publication:

Integration of vertical carbon nanotube bundles for interconnects

Date

2010
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorKellens, Kristof
dc.contributor.authorCott, Daire
dc.contributor.authorPeys, Nick
dc.contributor.authorArstila, Kai
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned2021-10-18T15:34:26Z
dc.date.available2021-10-18T15:34:26Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16861
dc.source.beginpageK211
dc.source.endpageK217
dc.source.issue10
dc.source.journalJournal of the Electrochemical Society
dc.source.volume157
dc.title

Integration of vertical carbon nanotube bundles for interconnects

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
20919.pdf
Size:
849.51 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles