Publication:
Poly-silicon germanium thin-film package: study of structural features enabling CMOS-MEMS integration
Date
| dc.contributor.author | Claes, Gert | |
| dc.contributor.thesisadvisor | Celis, Jean-Pierre | |
| dc.contributor.thesisadvisor | Van Hoof, Chris | |
| dc.date.accessioned | 2021-10-19T12:51:23Z | |
| dc.date.available | 2021-10-19T12:51:23Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011-07 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18703 | |
| dc.title | Poly-silicon germanium thin-film package: study of structural features enabling CMOS-MEMS integration | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |