Publication:
Enabling 3X nm DRAM: Record low leakage 0.4 nm EOT MIM capacitors with novel stack engineering
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2107 since deposited on 2021-10-18
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Acq. date: 2026-01-08
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2107 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-01-08
Citations