Publication:

Enabling 3X nm DRAM: Record low leakage 0.4 nm EOT MIM capacitors with novel stack engineering

Date

2010

Proceedings Paper

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Files

21838.pdf 333.2 KB

Author(s)

Pawlak, Malgorzata

;

Popovici, Mihaela Ioana

;

;

Tomida, Kazuyuki

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;

;

;

Schaekers, Marc

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;

;

Vrancken, Christa

;

Govoreanu, Bogdan

;

Demeurisse, Caroline

;

;

Afanasiev, Valeri

;

Debusschere, Ingrid

;

Altimime, Laith

;

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