Publication:

Electrical characterization of advanced gate dielectrics

Date

2007
Book Chapter
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dc.contributor.authorDegraeve, Robin
dc.contributor.authorSchmitz, Jurrian
dc.contributor.authorPantisano, Luigi
dc.contributor.authorSimoen, Eddy
dc.contributor.authorHoussa, Michel
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2021-10-16T15:42:01Z
dc.date.available2021-10-16T15:42:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12023
dc.source.beginpage371
dc.source.bookDielectric Films for Advanced Microelectronics
dc.source.endpage435
dc.title

Electrical characterization of advanced gate dielectrics

dc.typeBook chapter
dspace.entity.typePublication
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