Publication:

Quantitative modelling of deposition of airborne molecular contamination

Date

2019-09
Meeting abstract
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dc.contributor.authorMertens, Paul
dc.contributor.imecauthorMertens, Paul
dc.date.accessioned2021-10-27T13:54:39Z
dc.date.available2021-10-27T13:54:39Z
dc.date.issued2019-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33579
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2019-02/23/1119.abstract
dc.source.beginpage1
dc.source.conferenceThe 236th ECS Fall Meeting 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationAtlanta, GA USA
dc.source.endpage2
dc.title

Quantitative modelling of deposition of airborne molecular contamination

dc.typeMeeting abstract
dspace.entity.typePublication
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