Publication:
Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN
| dc.contributor.author | Morris, Richard | |
| dc.contributor.author | Cuduvally, Ramya | |
| dc.contributor.author | Lin, Jhao-Rong | |
| dc.contributor.author | Zhao, Ming | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Thuvander, Mattias | |
| dc.contributor.author | Fleischmann, Claudia | |
| dc.contributor.imecauthor | Morris, Richard | |
| dc.contributor.imecauthor | Cuduvally, Ramya | |
| dc.contributor.imecauthor | Lin, Jhao-Rong | |
| dc.contributor.imecauthor | Zhao, Ming | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Fleischmann, Claudia | |
| dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
| dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
| dc.contributor.orcidimec | Morris, Richard::0000-0002-0902-7088 | |
| dc.contributor.orcidimec | Lin, Jhao-Rong::0009-0008-0897-3188 | |
| dc.date.accessioned | 2023-04-06T15:28:43Z | |
| dc.date.available | 2022-09-04T02:39:18Z | |
| dc.date.available | 2023-04-06T15:28:43Z | |
| dc.date.issued | 2022-11 | |
| dc.description.wosFundingText | The authors acknowledge the financial support by FWO Hercules through project ZW13_09. The authors declare the following financial interests/personal re- lationships which may be considered as potential competing interests: Richard Morris reports was provided by Imec. | |
| dc.identifier.doi | 10.1016/j.ultramic.2022.113592 | |
| dc.identifier.issn | 0304-3991 | |
| dc.identifier.pmid | MEDLINE:35988476 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40337 | |
| dc.publisher | ELSEVIER | |
| dc.source.beginpage | Art. 113592 | |
| dc.source.endpage | na | |
| dc.source.issue | November | |
| dc.source.journal | ULTRAMICROSCOPY | |
| dc.source.numberofpages | 9 | |
| dc.source.volume | 241 | |
| dc.subject.keywords | ATOM-PROBE TOMOGRAPHY | |
| dc.subject.keywords | EVAPORATION | |
| dc.subject.keywords | EVENTS | |
| dc.subject.keywords | DETECTOR | |
| dc.subject.keywords | BORON | |
| dc.title | Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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