Publication:
Three-dimensional carrier profiling of InP-based devices using scanning spreading resistance microscopy
Date
| dc.contributor.author | Xu, Mingwei | |
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-15T00:05:42Z | |
| dc.date.available | 2021-10-15T00:05:42Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7070 | |
| dc.source.beginpage | 177 | |
| dc.source.endpage | 179 | |
| dc.source.issue | 1 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 81 | |
| dc.title | Three-dimensional carrier profiling of InP-based devices using scanning spreading resistance microscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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