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Correction to: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process (vol 15, pg 17335, 2023)

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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-1112-8950
cris.virtual.orcid0000-0002-8245-9442
cris.virtualsource.departmentabd4c200-97e4-4c07-9ea0-e8e329dccb4d
cris.virtualsource.departmentf421472b-3c78-4486-a88e-266fc55314cb
cris.virtualsource.orcidabd4c200-97e4-4c07-9ea0-e8e329dccb4d
cris.virtualsource.orcidf421472b-3c78-4486-a88e-266fc55314cb
dc.contributor.authorLi, Yingying
dc.contributor.authorWorsey, Elliott
dc.contributor.authorBleiker, Simon J.
dc.contributor.authorEdinger, Pierre
dc.contributor.authorKulsreshath, Mukesh Kumar
dc.contributor.authorTang, Qi
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorQuack, Niels
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorPamunuwa, Dinesh
dc.contributor.authorNiklaus, Frank
dc.date.accessioned2026-06-09T07:06:20Z
dc.date.available2026-06-09T07:06:20Z
dc.date.createdwos2026-02-12
dc.date.issued2023
dc.description.abstractCorrection for ‘Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process’ by Yingying Li et al., Nanoscale, 2023, https://doi.org/10.1039/d3nr03429a. The authors regret the omission of one corresponding author, Dinesh Pamunuwa, from the original manuscript. The corrected list of authors and affiliations for this paper is as shown above. The Royal Society of Chemistry apologises for these errors and any consequent inconvenience to authors and readers.
dc.identifier.doi10.1039/d3nr90214e
dc.identifier.issn2040-3364
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59649
dc.language.isoeng
dc.original.retractedhttps://doi.org/10.1039/D3NR03429A
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherROYAL SOC CHEMISTRY
dc.source.beginpage18940
dc.source.endpage18940
dc.source.issue46
dc.source.journalNANOSCALE
dc.source.numberofpages1
dc.source.volume15
dc.title

Correction to: Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process (vol 15, pg 17335, 2023)

dc.typeJournal article correction
dspace.entity.typePublication
imec.internal.crawledAt2026-04-07
imec.internal.sourcecrawler
imec.internal.wosCreatedAt2026-04-07
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