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Investigation of the evaporation and wetting mechanism of IPA-DIW mixtures

Date

2013
Proceedings Paper
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dc.contributor.authorXu, XiuMei
dc.contributor.authorSmeers, Jens
dc.contributor.authorVereecke, Guy
dc.contributor.authorStruyf, Herbert
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-21T14:46:32Z
dc.date.available2021-10-21T14:46:32Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23411
dc.source.beginpage223
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XI - UCPSS
dc.source.conferencedate17/09/2012
dc.source.conferencelocationGent Belgium
dc.source.endpage226
dc.title

Investigation of the evaporation and wetting mechanism of IPA-DIW mixtures

dc.typeProceedings paper
dspace.entity.typePublication
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