Publication:

Poly-SiGe-based CMUT array with high acoustical pressure

Date

2012
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHelin, Philippe
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorVerbist, Agnes
dc.contributor.authorBryce, George
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSeveri, Simone
dc.date.accessioned2021-10-20T11:32:08Z
dc.date.available2021-10-20T11:32:08Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20794
dc.source.beginpage305
dc.source.conference25th IEEE International Conference on Micro Electro Mechanical Systems - IEEE MEMS
dc.source.conferencedate29/01/2012
dc.source.conferencelocationParis France
dc.source.endpage308
dc.title

Poly-SiGe-based CMUT array with high acoustical pressure

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
23686.pdf
Size:
1.81 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions