Publication:

Individual device analysis using hybrid TEM-scalpel SSRM metrology

Date

2017

Proceedings Paper

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Author(s)

Celano, Umberto

;

;

Drijbooms, Chris

;

Dixon-Luinenburg, Oberon

;

Richard, Olivier

;

;

Vancoille, Eric

;

Paredis, Kristof

;

;

Schulze, Andreas

;

Hikavyy, Andriy

;

Witters, Liesbeth

;

;

Collaert, Nadine

;

Horiguchi, Naoto

;

Vandervorst, Wilfried

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