CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording

dc.contributor.author	Seidl, Karsten
dc.contributor.author	Herwik, Stanislav
dc.contributor.author	Torfs, Tom
dc.contributor.author	Pereira Neves, Hercules
dc.contributor.author	Paul, Oliver
dc.contributor.author	Ruther, Patrick
dc.contributor.imecauthor	Torfs, Tom
dc.contributor.orcidimec	Torfs, Tom::0000-0002-1302-3346
dc.date.accessioned	2021-10-19T18:37:39Z
dc.date.available	2021-10-19T18:37:39Z
dc.date.embargo	9999-12-31
dc.date.issued	2011
dc.identifier.issn	1057-7157
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/19755
dc.source.beginpage	1439
dc.source.endpage	1448
dc.source.issue	6
dc.source.journal	Journal of Microelectromechanical Systems
dc.source.volume	20
dc.title	CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording
dc.type	Journal article
dspace.entity.type	Publication
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