Publication:

Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording

Date

2009
Journal article
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dc.contributor.authorHerwik, S.
dc.contributor.authorKisban, S.
dc.contributor.authorAarts, Arno
dc.contributor.authorSeidl, K.
dc.contributor.authorGirardeau, G.
dc.contributor.authorBenchenane, K.
dc.contributor.authorZugaro, M.B.
dc.contributor.authorWiener, S.I.
dc.contributor.authorPaul, O.
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorRuther, P.
dc.contributor.imecauthorAarts, Arno
dc.date.accessioned2021-10-17T22:51:15Z
dc.date.available2021-10-17T22:51:15Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15467
dc.source.beginpage74008
dc.source.issue7
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume19
dc.title

Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording

dc.typeJournal article
dspace.entity.typePublication
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