Publication:
Initial assessment of the lithographic impact of the use of hard pellicles : an overview
Date
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.author | Kocsis, Michael | |
| dc.contributor.author | Bruls, R. | |
| dc.contributor.author | Grenville, A. | |
| dc.contributor.author | Van Peski, C. | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.contributor.imecauthor | Kocsis, Michael | |
| dc.date.accessioned | 2021-10-15T13:00:24Z | |
| dc.date.available | 2021-10-15T13:00:24Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8750 | |
| dc.source.beginpage | 116 | |
| dc.source.conference | Optical Microlithography XVII | |
| dc.source.conferencedate | 22/02/2004 | |
| dc.source.conferencelocation | Santa Clara, CA USA | |
| dc.source.endpage | 123 | |
| dc.title | Initial assessment of the lithographic impact of the use of hard pellicles : an overview | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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