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Investigation of the formation of sputtered oxide clusters with the laser assisted sputtered neutral mass spectrometry technique (LASNMS)
Publication:
Investigation of the formation of sputtered oxide clusters with the laser assisted sputtered neutral mass spectrometry technique (LASNMS)
Date
2000
Proceedings Paper
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4765.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vlekken, J.
;
Polus, D.
;
D'Olieslaeger, Marc
;
Vandervorst, Wilfried
;
De Schepper, Luc
Journal
Abstract
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1919
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Acq. date: 2025-10-24
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Metrics
Views
1919
since deposited on 2021-10-14
412
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations